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Brother Furnace provides perfect solutions for Vapor Deposition Furnace for customers all over the world. The following are answers to common Tube furnace questions.
A CVD (Chemical Vapor Deposition) tube furnace is a equipment used for film deposition, converting gaseous precursors into solid films through chemical reactions. Its structure is typically tubular, with controllable internal temperatures, making it suitable for high-temperature processes.
CVD (Chemical Vapor Deposition) utilizes thermal energy to promote gas-phase reactions for film deposition, while PECVD (Plasma-Enhanced Chemical Vapor Deposition) employs plasma to lower the deposition temperature and improve film quality. PECVD can deposit films at relatively low temperatures, making it suitable for temperature-sensitive substrates.
This CVD tube furnace reaches 1200°C with HRE resistance wire heating and features intelligent 50-segment control, over-temperature protection, and double-layer air cooling. It supports a film deposition rate of up to 10 A/s, with ±1°C temperature accuracy and 8% uniformity, achieving an ultimate vacuum of 10 Pa for stable processes. Optional gas mixing systems and a high-definition touchscreen enhance functionality.
CVD tube furnaces are essential in semiconductor, optoelectronic materials, thin-film solar cells, coating technology, and advanced materials research. They deposit high-quality films to improve equipment performance in the semiconductor industry and manufacture efficient optoelectronic conversion layers. Additionally, their use in nanomaterials and coating technology ensures high uniformity and consistency in film preparation, facilitating the development of various high-performance products.
Understand the detailed needs of customers.
Provide and design perfect solutions.
Welcome to visit the factory and learn about the company’s strength.
Drawings and technical confirmation.
Follow up the production progress throughout the entire process and provide timely feedback to customers.
Product packaging is complete and shipped safely.
Professional technical team provides online support.
Exclusive service from the after-sales team and regular return visits.